TY  - BOOK
AU  - Van Zant,Peter
TI  - Microchip fabrication: a practical guide to semiconductor processing 
SN  - 0071356363
U1  - 537.6223 22
PY  - 2000///
CY  - New York
PB  - McGraw-Hill
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
N1  - Includes index; Includes bibliographical references and index; Dept. of EEE
UR  - http://www.loc.gov/catdir/bios/mh041/00023171.html
UR  - http://www.loc.gov/catdir/description/mh021/00023171.html
UR  - http://www.loc.gov/catdir/toc/mh021/00023171.html
ER  -