Van Zant, Peter. <br/><br/>
Microchip fabrication:  a practical guide to semiconductor processing / 
Peter Van Zant. 
 - 4th ed. 
 - New York:  McGraw-Hill,  c2000. 
 - xvi, 632p.:  ill.;, figs.;, tables.;  23 cm. 
<br/><br/> Includes index. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/> Dept. of EEE 
<br/><br/><label>ISBN: </label>0071356363 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction.<br/>Integrated circuits--Design and construction.
<br/><br/><label>Dewey Class. No.: </label>537.6223  / ZAM